Ultrapure Water Processing

Process Description


Semiconductor manufacturing processes has high requirements for their precision production equipment and complex processes, with ever increasing demands of their ultrapure water system. 

Semiconductor industries use ultrapure water mainly through these four processes: primary processing, reverse osmosis (RO), electrodeionization (EDI) and polishing. In some semiconductor plants, mixed ion exchange beds are used instead of EDI due to the raw water quality and industrial requirements to remove weak electrolytes.


Product Features


  • • Reduced usage of additives compared to conventional processes; more environmentally friendly.

  • • Shorter regeneration cycle than ion exchange devices.

  • • Ultrafine, RO concentrate


Applicable Products

  • • Primary Processing

Multi-media Filter + Activated Carbon Filter
Coarse Filter + Ultrafiltration Device

  • • Reverse Osmosis 

Reverse Osmosis System

  • Electrodeionization (EDI)

EDI and CEDI modules

  • Polishing Mixed Bed


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